Cameca LEAP 4000X HR
This advanced atom probe microscope is capable of analysing needle-shaped volumes up to 200nm in width and several hundred nm in length, with equal sensitivity to all elements (high and low Z). Fast laser pulsing allows data acquisition rates as high as 1M atoms per minute for suitable specimens. Data sets in excess of 200M atoms can be captured and analysed.
Spatial resolution: <1nm (typ.)
Mass resolution (M/∆MFWHM): >1000 (typ.)
Analysis time per specimen: 1-12 hours
Further details can be found on the Cameca website.
*Because of the 3D spatial resolution of the atom probe technique, species with much lower bulk concentrations may be analysed if they are distributed inhomogeneously at scales of 1-100nm.
Tescan LYRA focussed ion beam scanning electron microscope
The Lyra is a high resolution Ga+ FIB (2.5 nm resolution) and includes a TOF-SIMS detector as well as Oxford AZtec EDS and EBSD detectors. This combination enables the FIB-SEM to be used for high precision site-selective sample preparation (for atom probe, TEM or TKD) and advanced microanalysis in 2D and 3D. Results from surface analyses (electron and ion imaging, EDS, EBSD), sub-surface analyses (3D imaging, 3D EDS, 3D EBSD) and unique in-situ TOF-SIMS analyses are able to be correlated with site specific atom probe tomography results which enables a thorough characterisation of highly complex materials on a wide range of length scales.
Details of the system are available here